SEA-NET - Semiconductor Equipment Assessment for NanoElectronic Technologies (FP6-IST) (2006-01-01 - 2008-12-31) (»add to infobox)

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FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (DE212 - München, Kreisfreie Stadt) (Germany), E V GROUP E. THALLNER GMBH (AT311 - Innviertel) (Austria), ION BEAM SERVICES (FR824 - Bouches-du-Rhône) (France), AIXTRON AKTIENGESELLSCHAFT (DEA21 - Aachen, Kreisfreie Stadt) (Germany), SINGULUS TECHNOLOGIES AKTIENGESELLSCHAFT (DE264 - Aschaffenburg, Landkreis) (Germany), OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED (UKJ14 - Oxfordshire) (Great Britain), SEZ AG (AT211 - Klagenfurt-Villach) (Austria), DMS DYNAMIC MICRO SYSTEMS SEMICONDUCTOR EQUIPMENT GMBH (DE138 - Konstanz) (Germany), SEMILAB FELVEZETO FIZIKAI LABORATORIUM RT (HU101 - Budapest) (Hungary), GEMETEC GESELLSCHAFT FUER MESSTECHNIK UND TECHNOLOGIE MBH (DE212 - München, Kreisfreie Stadt) (Germany), JORDAN VALLEY SEMICONDUCTORS LTD (IL - Israel) (Israel), JENOPTIK AUTOMATISIERUNGSTECHNIK GMBH (DEG03 - Jena, Kreisfreie Stadt) (Germany), COMMISSARIAT A L'ENERGIE ATOMIQUE (CEA) (FR101 - Paris) (France), INFINEON TECHNOLOGIES AG (DE21H - München, Landkreis) (Germany), PHILIPS INNOVATIVE TECHNOLOGY SOLUTIONS NV (BE242 - Arr. Leuven) (Belgium), INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW (BE242 - Arr. Leuven) (Belgium), STMICROELECTRONICS CROLLES 2 SAS (FR714 - Isère) (France), CENTROTHERM GMBH & CO. KG (DE145 - Alb-Donau-Kreis) (Germany), S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES (FR714 - Isère) (France), FACHHOCHSCHULE WIENER NEUSTADT FUER WIRTSCHAFT UND TECHNIK GESELLSCHAFT M.B.H. (AT122 - Niederösterreich-Süd) (Austria), DRAEGER SAFETY AG & CO. KGAA (DEF03 - Lübeck, Kreisfreie Stadt) (Germany), R3T GMBH RAPID REACTIVE RADICALS TECHNOLOGY (DE21H - München, Landkreis) (Germany), MCRT MICRO CLEANROOM TECHNOLOGY GMBH (DE721 - Gießen, Landkreis) (Germany), QIMONDA DRESDEN GMBH & CO.OHG (DED21 - Dresden, Kreisfreie Stadt) (Germany), INFINEON TECHNOLOGIES AUSTRIA AG (AT211 - Klagenfurt-Villach) (Austria), PHILIPS SEMICONDUCTORS CROLLES R&D (FR714 - Isère) (France), NXP SEMICONDUCTORS NETHERLANDS B.V. (NL414 - Zuidoost-Noord-Brabant) (Netherlands)

Main objective of the IP SEA-NET is to validate emerging semiconductor manufacturing equipment for the 65nm - 22nm nodes, together with advances in equipment for cleaning/etch, handling, metrology/ analysis, modelling/APC and production control for Nanoelectronic CMOS. SEA-NET will strengthen the European equipment industry in a sustainable way by combining advanced RandD with equipment sub-projects involving a wide community of equipment suppliers, users and research institutes. The selection of additional projects will be done in a competitive call starting after 12 months. The equipment companies involved have a high proportion of SMEs who will benefit from their involvement with such organisations and the credibility that results. Joint RandD including; advanced process control capabilities, enhanced wafer and equipment logistics, virtual equipment engineering compliance and control of communication interfaces. Applications will be evaluated for FEOL, BEOL that will improve equipment manufacturing and design criteria thus impacting equipment perfomance and time to maturity. All this will provide progress beyond the current state-of-the-art and lead to cost effective equipment development. Each sub-project will be refined for the progressively emerging technology nodes. This will be done by optimizing the inputs from ITRS and the user requirements as identified within SEA-NET and will provide the benchmark for the assessment metrics. A powerful and flexible management structure is identified for this IP, which has high numbers of; sub-projects, assessment sites, SME´s and users from both, IC-industry and industrially oriented research institutions. The management is structured at the Integrated Project and Sub-Project level. The sub-projects deal with their specific equipment applications/evaluations/own dissemination whilst the IP management covers the independent monitoring of sub-projects and efficient management of the resu

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